|
Title |
Associate Professor |
|
Research Fields, Keywords |
Semiconductor engineering, Semiconductor devices, Physics of semiconductor, Semiconductor manufacturing processes |
KOYAMA Masatoshi
|
|
|
Graduating School 【 display / non-display 】
-
Osaka Institute of Technology Faculty of Engineering Department of Electrical and Electronic Systems Engineering Others
Graduate School 【 display / non-display 】
-
Osaka Institute of Technology Graduate School of Engineering Electrical and Electronic Engineering Doctor's Course Completed Others
Degree 【 display / non-display 】
-
Osaka Institute of Technology - Doctor(Engineering) Physics of Semiconductor, Devices
Association Memberships 【 display / non-display 】
-
2025.08-Now
European Materials Research Society FRANCE
-
The Electrochemical Society Others
Committee Memberships 【 display / non-display 】
-
2024.06-Now
-
2021.04-2023.03
-
2024.04-Now
-
2018.06-Now
-
2019.07
Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2019) Technical Program Committee
Research field 【 display / non-display 】
-
Electronic materials/Electric materials
-
Physics of semiconductors
-
Semiconductor engineering
Papers 【 display / non-display 】
-
Fabrication and Characterization of β-Phase (Ga1−xInx)2O3 Alloyed Films on C-Plane Sapphire Substrates by Chemical Solution Deposition for Application in Visible-Blind UV Photodetectors
( Multiple Authorship )
74 ( 10 ) 2025.10
Research paper (scientific journal) Japanese
-
Heat Resistance Improvement of Palladium Pre Plated Frames of Semiconductor Packaging with a New Additive for Nickel Plating
S. Sekiguchi, S. Mizuhashi, Y. Sato, M. Koyama, Y. Shindo ( Multiple Authorship )
CS MANTECH Digest of papers 2025.05
Research paper (international conference proceedings) English
-
Electron-Beam Deposition with Low Spitting Silver Source Material Improved by New Impurity Removal Processes
Y. Fujimoto, T. Kobayashi, M. Koyama, Y. Shindo ( Multiple Authorship )
CS MANTECH Digest of papers 2025.05
Research paper (international conference proceedings) English
-
Electron-beam Deposition with Low Spitting Platinum Source Material Improved by New Impurity Removal Processes
Atsushi Kawashimo, Takahiro Kobayashi, Masatoshi Koyama, Yuichiro Shindo ( Multiple Authorship )
CS MANTECH Digest of papers 2024.05
Research paper (international conference proceedings) English
-
Fabrication and characterization of low barrier height InAs/GaxIn1-xAs/InAs heterostructure diodes toward millimeter-wave detection
Moto Inou,; Masatoshi Koyama, Toshihiko Maemoto, and Shigehiko Sasa ( Multiple Authorship )
2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) 2023.10
Research paper (international conference proceedings) English
Review Papers 【 display / non-display 】
-
Characterization of physical properties and UV photoresponse of amorphous GaOx thin films grown on c-plane sapphire substrates by mist CVD method
Iori YAMASAKI Shunsuke ENOKI Misaki NISHIKAWA Masatoshi KOYAMA Akihiko FUJII Toshihiko MAEMOTO ( Joint Work )
IEICE Technical Report ( IEICE ) ED2025-17 2025.06
Introduction and explanation (scientific journal) Japanese
-
UV Detection Properties of Mist CVD Grown Amorphous Ga2O3 Thin Films
Manami MIYAZAKI, Iori YAMASAKI, Yuma TANAKA, Masatoshi KOYAMA, Akihiko FUJII and Toshihiko MAEMOTO ( Joint Work )
IEICE Technical Report ( IEICE ) ED2024-17 15 - 18 2024.08
Introduction and explanation (scientific journal) Japanese
-
Fabrication and Characterization of Indium Oxide Thin Thin-Film Transistors using Excimer Light Assist Process
Ryosuke KASAHARA Takeaki KOMAI Hideo WADA† Masatoshi KOYAMA Akihiko FUJII Akihiro SHIMIZU Noritaka TAKEZOE Shion YAMAGUCHI Hiroyasu ITO and Toshihiko MAEMOTO ( Joint Work )
IEICE Technical Report ( IEICE ) ED2024-15 8 - 11 2024.08
Introduction and explanation (scientific journal) Japanese
Research Grants and Projects 【 display / non-display 】
-
Project Year：2025.04 - 2026.03
-
Project Year：2024.04 - 2025.03
-
Project Year：2021.04 - 2024.03
-
Project Year：2020.04 - 2024.03
-
Project Year：2019.04 - 2022.03
Presentations 【 display / non-display 】
-
Growth of orthorhombic κ-Ga₂O₃ thin films on N-polar GaN by mist chemical vapor deposition
Misaki Nishikawa, Masatoshi Koyama, Akihiko Fujii, Toshihiko Maemoto
International conference European Material Research Society Fall Meeting ( Warsaw, Poland ) Poster (general)
2025.09 -
Growth of orthorhombic κ-(In1-xGax)2O3 thin films on (111) 3C-SiC templates via mist chemical vapor deposition
Masatoshi Koyama, Yuma Tanaka, Misaki Nishikawa, Shunsuke Enoki, Akihiko Fujii, Toshihiko Maemoto
International conference European Material Research Society Fall Meeting ( Warsaw, Poland ) Oral Presentation(general)
2025.09 -
Mist CVD Growth of κ-(InxGa1-x)2O3 on (111) 3C-SiC/Si templates
Misaki Nishikawa, Shunsuke Enoki, Yuma Tanaka, Masatoshi Koyama, Akihiko Fujii, Toshihiko Maemoto
Internal meeting Poster (general)
2025.09 -
Fabrication and characterization of deep ultraviolet photodetectors using amorphous GaOx thin-films deposited on quartz glass substrates
Shunsuke Enoki, Iori Yamasaki, Misaki Nishikawa Masatoshi Koyama, Akihiko Fujii and Toshihiko Maemoto
Internal meeting Poster (general)
2025.09 -
Fabrication and characterization of top-gate InGaO thin-film transistors using aqueous precursor solutions with an excimer light irradiation processing
Hideya Ochiai, Kazuki Ueda, Takuya Nomura, Akira Fujimoto, Hideo Wada, Masatoshi Koyama, Akihiko Fujii, Akihiro Shimizu, Noritaka Takezoe, Hiroyasu Ito, Toshihiko Maemoto
Internal meeting Oral Presentation(general)
2025.09